Scientech濕法設備 Wet Process Machine
Scientech濕法設備 Wet Process Machine
2002年，辛耘企業投入批次式濕製程設備研發製造，已經獲得國內外客戶採用與肯定。目前辛耘擁有 5,000㎡生產製造廠房，還擁有 Class 10 等級無塵室服務客戶製程驗證。產品包含手動 / 半自動 / 全自動的批次濕製程設備,提供客戶2”~12”製程應用需求。特有的cassette type / boat type / cassette-less type技術提供半導體晶圓、藍寶石、玻璃、太陽能晶圓、薄化晶圓等等..的應用。此外，專利產品Advantech Dry 提供客戶各種關鍵乾燥的製程應用。
應用:
Wet Bench for Front-end Semiconductor
RCA Clean / Etching / PR Strip / Reclaim / Mask Cleaner
Wet Bench for Back-end Semiconductor
Clean / Etching / PR Strip / Plating / Developer / Mask Cleaner / Electro-less Plating
Wet Bench for MEMS
Clean / PR Strip / Si Etching / Oxide Release / Electro-less Plating
Wet Bench for GaAs
Clean / PR Strip / Metal Lift-Off / Electro-less Plating / Etching
Wet Bench for LED
High Temperature Phosphoric Acid Etching / KOH Etching / ITO / BOE / SPM / HCl Etching / PR Strip / Developer
Wet Bench for Solar Cell
Texture
Advantech Dryer
Wet Bench for Parts / Tube Clean
Chemical Supply System
OEM for Tools
Single Wafer Process Tool for Back-end Semiconductor
Etching / Wafer Clean / PR Strip / De-flux / Metal Lift-off
Single Wafer Process Tool for GaAs
Etching / Wafer Clean / PR Strip / Metal Lift-off
Single Wafer Process Tool for MEMS
Etching / Wafer Clean / PR Strip / De-flux / Metal Lift-off